Nikon files patent case against ASML Carl Zeiss over lithography tech

Nikon files patent case against ASML, Carl Zeiss over lithography tech Japan's Nikon Corp on Monday said it has initiated legal action against ASML Holding NV and Carl Zeiss AG [CZTOP.UL], saying the Dutch and Germany companies used its lithography technology without its permission. Nikon, the world's eighth-largest chip equipment […]